Semiconductor Pumped UV Laser Trimming Machine Air Cooled 355nm

        Laser Trimming Machine for Sensor

1.Summary

The laser resistance trimming machine of Wuhan Questt ASIA Technology Co., Ltd. is specially developed and produced for the thick film circuit and thin film circuit industry. Source trimming (resistance adjustment) and active trimming (circuit function adjustment) are mainly used for high-precision trimming of thin-film, thick-film, hybrid integrated circuits and various electronic modules, involving the following industries:

l lAutomotive Electronics

l lSensors

l lCommunication electronics

l lMilitary industry is in scientific research

l lMedical

l lIndustrial Electronics

l lAerospace

The laser resistance trimming machines produced by our company are independently developed from the core measurement control system, software system, etc., and have all independent intellectual property rights, which can provide customers with comprehensive laser resistance trimming application solutions.

2. Equipment model and performance

LT7 series laser resistance trimming machine is a high-end configuration type laser resistance trimming machine launched by Wuhan Questt. LT7 series products adopt advanced special laser for laser resistance trimming.

High precision of resistance adjustment

• The whole machine has high resistance adjustment accuracy, and the resistance adjustment accuracy is consistent and the yield is high.
• lLT7 uses a special laser for laser resistance trimming, which provides a laser beam with high beam quality and extremely fine line width, and the laser heat effect is small.
• lUnique precision control mode, proprietary variable speed mining technology.
• lA variety of resistance-adjusting knife-type cutting functions.

Fast resistance adjustment

• The software has the function of coarse adjustment and fine adjustment setting, which can set the proportional relationship between coarse adjustment and fine adjustment according to the characteristics of the resistance, which effectively improves the resistance adjustment speed under the premise of ensuring the accuracy.
• lHigh-speed measurement time, single measurement time is only 25us.
• lHigh-precision step-and-repeat mechanism: using a linear motor platform, the moving speed and acceleration are fast; it can realize one-cycle resistance adjustment of multiple unit circuits.
• lHigh-speed probe board lift: effectively improve the processing efficiency in the process of cyclic resistance adjustment of multiple unit circuits.

Strong function

• lWith the powerful software programming function in the industry, it can adapt to various resistance adjustment and function adjustment of electronic modules, and easily realize the special needs of customers and high automatic operation.
• lIn addition to basic resistance and voltage measurement, with external special modules, the measurement signal can be current, frequency, inversion and other signals.
• l Programmatic automatic control of laser power, motion, measurement range, etc. can be realized.
• lProbe Z-axis, laser focus Z-axis automatic motor control movement, programmable.
• lPowerful database function, the entire production process is recorded and traceable.
• lThe warning function of unqualified products can effectively prevent unqualified products from flowing into the next process.
• lThe positioning coordinates are obtained in real time through the image, which is easy to operate and improves the positioning accuracy of the product.

High reliability and stability

• The core components are imported to ensure the quality
• lUsing special granite pedestal: It can effectively reduce the inertial vibration caused by the start, stop and acceleration of the workbench; at the same time, it can maintain the stability of the temperature of the machine.

Low operating and maintenance costs

• High efficiency, low energy consumption and cost saving

The laser electro-optical conversion efficiency reaches 25%, and the average daily power consumption is less than 10 degrees, which is 1/10 of the traditional flash lamp pumped solid-state laser. Long-term use can save users a lot of energy expenditure, reduce carbon emissions, long service life, high performance Stable and maintenance-free, reducing downtime.

3. Laser trimmer solution

• The principle of laser resistance trimming

The principle of laser resistance trimming is to use a very fine laser beam to hit the thick and thin film resistors, and realize the cutting of thick and thin film circuits by vaporizing the resistor body. The laser beam cuts the thick and thin film resistors according to the program predetermined by the computer, and changes the resistance value of the resistors by changing the geometric shapes of the thick and thin film resistors. As the laser cutting process progresses, the real-time measurement circuit monitors the changes in the resistance values of the thick and thin film resistors in real time, and the resistance values of the thick and thin film resistors are constantly approaching the target resistance value. That is, the laser resistance trimming process is realized.

When the thick film resistor is used in the electronic module, the function modification of the electronic module can be realized by adjusting the resistance change so that the output signal of the electronic module also changes.

Laser resistance trimming changes the conductive cross-sectional area and conductive length of the resistor body, and can trim the resistor body below the target resistance value to the required accuracy range.

Equipment outline drawing (subject to the actual object)

(1)．Laser system

Used to cut thick and thin film resistors, it is a "light knife" for resistor cutting. This machine adopts advanced special laser for laser resistance adjustment, with good beam quality, high peak power and excellent incision quality. Small and compact, air-cooled, with high efficiency and reliability not found in other lasers. The core device pump source, crystal, Q switch, etc. are all imported.

Special laser for laser resistance trimming

(2)． Laser beam positioning system

It is used to realize the positioning of the laser beam and the control of the movement track (cutting path). Adopt precision galvanometer system. Controls the position of the beam in the X and Y directions. Shorten beam positioning time and trimming time, high work efficiency, high speed and high precision.

Precision Galvo

(3)．CCD image positioning system

Imaging system with dedicated lens and CCD. The laser coaxial imaging technology is used to ensure that the laser target point and the imaging target point are overlapped within the laser scanning range.

Imported image recognition software is used to achieve automatic image positioning through image matching.

(4)．Step-and-repeat mechanical motion platform

The imported precision linear motor system is adopted, and the grating ruler is closed-loop controlled. The movement precision is high and the speed is fast, which greatly improves the movement acceleration. It can realize convenient loading and unloading, and high-speed cyclic resistance adjustment of multiple unit circuits, which greatly improves production efficiency. Features high speed and high precision..

(5)．measuring system

The resistance measurement adopts the method of four-wire system plus current measurement and voltage measurement. It has multiple high-precision constant current sources, and the corresponding range of each resistance can be automatically matched to obtain the best measurement accuracy. The resistance measurement generally uses the following probes Special probes for board soldering are used for measurement. The measurement system can be automatically calibrated by an external standard resistance board. Optional GPIB interface for external instrument control or measurement.

Electronic module function adjustment generally provides special probe measurement methods for product characteristics.

(6)．Laser focusing system

The laser focal length is directly controlled by the computer. By setting the focal length zero point and inputting the thickness of the workpiece, the focus can be automatically realized. This function can realize the resistance adjustment of different types of thick film resistor products, which improves the application range and efficiency of the laser resistance adjustment machine.

(7)．Probe movement

The movement of the probe is controlled by a high-speed motor, the running distance can be set arbitrarily, and the programming control function can be realized.

(8)．Software system

· Powerful application software based on WINDOWS platform.

·With the powerful software programming function in the industry, it can adapt to various resistance adjustment and function adjustment of electronic modules, and easily realize the special needs of customers and high automatic operation.

·Powerful database function, the entire production process is recorded and traceable.

·The software of unqualified products changes color and highlights the prompt function, which can effectively prevent unqualified products from flowing into the next process.

·The positioning coordinates are obtained in real time through the image, which is easy to operate and improves the positioning accuracy of the product.

·The multi-function measurement platform can be realized by programming, and it has the function of resistance measurement and sorting.

4.Main configuration of a single device

4. Technical parameter

1．Laser system

• lLaser wavelength: 1064nm
• lAverage laser power: 6W@10KHZ (TEM00)
• lTypical spot size: 30-40µm
• lFocus mode: computer program control

2．Laser beam positioning system

• lLaser scanning range: 60mm X 60mm
• lRepeat positioning accuracy: 2.5µm
• lLaser beam motion resolution: 1µm
• lMaximum scanning speed: 7000mm/s
• lPositioning method: programmable positioning or image recognition automatic positioning

3. Image surveillance system

• lMonitoring method: laser coaxial monitoring
• lProprietary technology: achromatic technology, laser and imaging overlap within the format
• lMonitoring field of view: 4-6mm (diagonal)
• lLighting source: LED lighting

4. measuring system

• lResistance measurement method: add current to measure voltage

Four-wire system, two-wire system computer program control

• lResistance measurement mode: three-speed mode setting, programmable control
• lResistance measurement range: 0.1Ω-100MΩ (16bit resolution)
• lResistance measurement accuracy:

0.1Ω< Rx < 100Ω ±0.02% + 0.5% / Rx

100Ω< Rx < 100KΩ ±0.02%

100KΩ< Rx < 100MΩ ±0.02% + 0.05% * Rx

• l Resistance measurement speed: 25µs
• lDC voltage resolution: 0.16µV (under 10mV full scale condition)
• lProbe board: 48PIN, any definition, compatible with ESI imported equipment
• lProbe board movement: computer program control
• lVoltage measurement range: ±100mV~ ±10V 16bit resolution (other ranges are optional)

5. Computers and Software Systems

• lSoftware programmable, can flexibly realize automatic operation, meet resistance adjustment and circuit function adjustment
• lDatabase function, all resistance adjustment data can be written to the database for storage, with good traceability
• lThe resistance can be controlled by manual single-chip control, and it can also be automatically adjusted by continuous matrix (continuous chip processing)
• lAccurate resistance adjustment can be performed by setting the laser dot resistance adjustment method
• lAccording to the difference of the initial resistance value, different resistance adjustment parameters can be selected to perform resistance adjustment

6. Step-and-repeat mechanical motion system

• lMovement mode: linear motor motion system
• lMotion range: 300mm*300mm
• lMaximum ceramic substrate size: 150mm*150mm
• lMotion resolution: 1µm
• lRepeat accuracy: ±1µm
• lPositioning accuracy: ±10µm
• lMaximum speed: 1000mm/s (no load)
• lMotion acceleration: 1.5G

7. Other technical indicators

• lCooling method: air cooling
• lPower supply voltage: 220V AC Air pressure: <0.4MPa Power consumption of the whole machine: 2500W